Control apparatus and method for a substrate tray on an in-line

Details Control apparatus and method for a substrate tray on an in-line Control apparatus and method for a substrate tray on an in-line

1991-11-21

1994-12-27

Callahan, Timothy P.

Registers

Systems controlled by data bearing records

235384, G06F 1520, G07B 1502

Patent

active

053767772

ABSTRACT:
The number of times a substrate tray has been used and the amount of distortion of the substrate tray are measured. When the number of times of use or the distortion amount of the substrate tray exceed a predetermined value, respectively, the substrate tray is exchanged automatically.

REFERENCES:
patent: 4042128 (1977-08-01), Shrader
patent: 4514130 (1985-04-01), Gladish
patent: 4717026 (1988-01-01), Fischer et al.
patent: 4987516 (1991-01-01), Belanger, Jr. et al.
patent: 5041721 (1991-08-01), Smith et al.
patent: 5117096 (1992-05-01), Bauer et al.
patent: 5128519 (1992-07-01), Tokuda

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