Method and apparatus for producing thin film of high to supercon

Details Method and apparatus for producing thin film of high to supercon Method and apparatus for producing thin film of high to supercon

1988-05-12

1989-09-12

Weisstuch, Aaron

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

20419211, 20419212, 20419224, 204298, 505816, H01L 3924, C23C 1434

Patent

active

048660329

ABSTRACT:
A thin film of a preselected compound having a large area is continuously produced on a substrate by depositing elements constituting the preselected compound from a target member onto the surface of a substrate by sputtering, comprising the steps of:

REFERENCES:
patent: 4046666 (1977-09-01), McClanahan et al.
patent: 4434037 (1984-02-01), Crank

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