CCD imager responsive to long wavelength radiation

Details CCD imager responsive to long wavelength radiation CCD imager responsive to long wavelength radiation

1988-03-15

1992-10-27

James, Andrew J.

357 50, 357 55, H01L 2978, H01L 2704, H01L 2906

Patent

active

051594196

ABSTRACT:
An infrared or x-ray imaging CCD array, including deep trench isolation (56) for capturing electron carriers formed deep in the substrate (46) as a result of long wavelength radiation or high energy particles. In virtual phase CCD circuits, the trench has formed on the sidewalls thereof a diffusion (58, 60) defining a vertical conductor for allowing hole carrier conduction between the substrate (46) and the virtual phase electrode (38).

REFERENCES:
patent: 4229752 (1980-10-01), Hynecek
patent: 4234362 (1980-11-01), Riseman
patent: 4857981 (1989-08-01), Matsumoto et al.
patent: 4878102 (1989-10-01), Bakker et al.

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