Evacuation apparatus with cryogenic pump and trap assembly

Details Evacuation apparatus with cryogenic pump and trap assembly Evacuation apparatus with cryogenic pump and trap assembly

1978-05-15

1980-07-29

Croyle, Carlton R.

Pumps

One fluid pumped by contact or entrainment with another

Jet

62 555, F04F 906

Patent

active

042148537

ABSTRACT:
A thin-film deposition apparatus comprises a cabinet having a vessel mounted therein which defines a vacuum chamber adapted to retain processed articles. A vacuum unit is mounted adjacent to the vessel to communicate in substantially unrestricted communication with an inlet opening to the vacuum chamber for selectively evacuating the same. A valve is reciprocally mounted in a chamber communicating with the inlet opening to selectively expose the inlet opening during the evacuation process. A plurality of water-cooled and V-shaped baffles or a primary trap is mounted between the piston and the vacuum unit to provide an optically dense view of the vacuum chamber from the downstream side of the trap and to trap contaminants, such as oil droplets, prior to their ingress into the vacuum chamber from the vacuum unit. In addition, a plurality of fins or a secondary trap is mounted in nesting relationship within the baffles to provide an optically dense view of the primary trap from the vacuum chamber side thereof. The fins are secured between a pair of laterally spaced copper plates which function to maintain the fins at a substantially low temperature level and further function as a cryogenic pump. The plates are exposed to liquid nitrogen temperature retained in a cooling chamber partially circumventing the valve chamber. A source of vaporizable material, retained in the vacuum chamber, is masked-off from egress into the valve chamber by baffle plates surrounding the same.

REFERENCES:
patent: 3019809 (1962-02-01), Ipsen et al.
patent: 3168819 (1965-02-01), Sarteler
patent: 3252652 (1966-05-01), Trendelebury et al.
patent: 3288354 (1966-11-01), Dennis
patent: 3423947 (1969-01-01), Mariya
patent: 3643625 (1972-02-01), Mahl
patent: 3649339 (1972-03-01), Smith
patent: 3785162 (1974-01-01), Long et al.
patent: 3998347 (1979-12-01), Mahl
patent: 4117694 (1978-10-01), Belmore

Affiliated with

Also associated with

Rating

Evacuation apparatus with cryogenic pump and trap assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Evacuation apparatus with cryogenic pump and trap assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Evacuation apparatus with cryogenic pump and trap assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-902529