Optical system

Details Optical system Optical system

1997-04-22

1999-07-06

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

2505051, H01J 3709

Patent

active

059200731

ABSTRACT:
An optical system for a particle beam device such as an electron microscope, e-beam device or FIB device, including a particle beam column having an optical axis along which a beam of particles is projected and an apertured plate positioned in the column having an aperture which is coaxial with the optical axis, the plate being moveable in a direction which is parallel to the optical axis.

REFERENCES:
patent: 2356535 (1944-08-01), Ruska
patent: 3291959 (1966-12-01), Schleich et al.
patent: 3638015 (1972-01-01), Browning et al.
patent: 3989348 (1976-11-01), Hudson et al.
patent: 4160905 (1979-07-01), Davey
patent: 4218621 (1980-08-01), Nakasuji et al.
patent: 4314158 (1982-02-01), Lucido
patent: 4349242 (1982-09-01), Ogura
patent: 4531057 (1985-07-01), Kobayashi
patent: 4543512 (1985-09-01), Nakasuji et al.
patent: 4544242 (1985-10-01), Schindl
patent: 4683366 (1987-07-01), Harte et al.
patent: 4684809 (1987-08-01), Nakasuji
patent: 4694178 (1987-09-01), Harte
patent: 4723845 (1988-02-01), Mizutani et al.
patent: 4801183 (1989-01-01), Palmer
patent: 4929839 (1990-05-01), Parker et al.
patent: 5105089 (1992-04-01), Yamada
patent: 5117117 (1992-05-01), Oae et al.
patent: 5142148 (1992-08-01), Sato
patent: 5180919 (1993-01-01), Oae et al.
patent: 5218524 (1993-06-01), Kasahara et al.
patent: 5223970 (1993-06-01), Oono et al.
patent: 5264706 (1993-11-01), Oae et al.
patent: 5291021 (1994-03-01), Tanaka et al.
patent: 5295989 (1994-03-01), Nakamura
patent: 5449915 (1995-09-01), Yamada et al.
patent: 5483065 (1996-01-01), Sato et al.
patent: 5661307 (1997-08-01), Tanaka et al.

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