Method for forming crystalline film employing localized heating

Details Method for forming crystalline film employing localized heating Method for forming crystalline film employing localized heating

1990-03-30

1993-05-25

Fourson, George

Fishing, trapping, and vermin destroying

437935, 437963, 437967, 437233, 427554, H01L 2126, H01L 21268, H01L 21205

Patent

active

052139972

ABSTRACT:
A method for forming a crystalline film comprises respectively introducing into a film forming space having a substrate arranged therein a gaseous starting material for formation of the crystalline film and a gaseous halogenic oxidizing agent capable of chemically reacting with the starting material to form the film, the substrate having a surface comprised of a non-single crystal material having a predetermined temperature distribution.

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