Process for making a thin molybdenum sulfide film and article

Details Process for making a thin molybdenum sulfide film and article Process for making a thin molybdenum sulfide film and article

1989-10-06

1990-12-04

Pianalto, Bernard

Stock material or miscellaneous articles

Composite

Of inorganic material

156643, 427 39, 427 70, 427109, 4271262, 427164, 427166, 427255, 4272552, 427309, 428704, 428938, B32B 900

Patent

active

049753401

ABSTRACT:
The process for making a thin Molybdenum sulfide film on a substrate in which the physical properties vary in a wide range and can be adjusted to the desired values comprises depositing on the substrate from a reaction gas mixture in the gas phase. This can be accomplished by decomposing a volatile molybdenum compound together with a volatile sulfur compound as a reactive gas in a glow discharge to form the reaction gas mixture in the presence of the substrate. The molybdenum compound can be molybdenum hexacarbonyl. The sulfur compound can be hydrogen sulfide.

REFERENCES:
patent: 4226898 (1980-10-01), Ovsltinsky et al.
patent: 4540607 (1985-09-01), Tsao et al.
patent: 4687560 (1987-08-01), Tracy et al.

Affiliated with

Also associated with

Rating

Process for making a thin molybdenum sulfide film and article does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for making a thin molybdenum sulfide film and article, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for making a thin molybdenum sulfide film and article will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-882829