Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Patent
1997-06-13
1999-07-27
Hardy, David B.
Active solid-state devices (e.g., transistors, solid-state diode
Alignment marks
257620, H01L 23544
Patent
active
059295295
ABSTRACT:
A reticle has a transfer region and a peripheral region defined in the plane of the reticle, the transfer region being formed with a pattern to be transferred and the peripheral region being disposed surrounding the periphery of the transfer region. Reference marks for defining one virtual reference line is formed in the plane of the reticle. A transfer pattern is formed in the transfer region and includes a long linear line segment oblique to the reference line. A pair of direction designating marks is disposed in the peripheral region along a virtual straight line parallel or perpendicular to the linear line segment of the transfer pattern.
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Fujitsu Limited
Hardy David B.
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