Communications – electrical: acoustic wave systems and devices – Signal transducers
Patent
1997-09-16
1999-09-21
Eldred, J. Woodrow
Communications, electrical: acoustic wave systems and devices
Signal transducers
367163, 367174, 310324, 310334, 29 2535, H01L 4108
Patent
active
059562927
ABSTRACT:
A monolithic micromechanical piezoelectric acoustic transducer with integrated control circuit includes a support member; a piezoelectric medium disposed on the support member; first and second electrodes engaging the piezoelectric medium; and a control circuit monolithically integrated with the piezoelectric medium and electrodes on the support member and including a switching circuit for selectively interconnecting the electrodes with an I/O bus and a signal processing circuit for conditioning signals propagating between the electrodes and the I/O bus; an array of such acoustic transducers that form an acoustic retina; and a method of making such transducers and arrays.
REFERENCES:
patent: 4841775 (1989-06-01), Ikeda et al.
patent: 5075641 (1991-12-01), Weber et al.
patent: 5209119 (1993-05-01), Polla et al.
patent: 5260596 (1993-11-01), Dunn et al.
patent: 5406163 (1995-04-01), Carson et al.
patent: 5488954 (1996-02-01), Sleva et al.
patent: 5633552 (1997-05-01), Lee et al.
By Seung S. Lee et al., "Piezoelectric Cantilever Microphone and Microspeaker", Jun. 1994, pp. 33-37.
Eldred J. Woodrow
The Charles Stark Draper Laboratory Inc.
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