Projection lens systems

Details Projection lens systems Projection lens systems

1997-09-05

1999-01-05

Sugarman, Scott J.

Optical: systems and elements

Lens

With field curvature shaping

359754, G02B 900

Patent

active

058568840

ABSTRACT:
Projection lens systems, which are used to transfer a pattern from a reticle onto a substrate, incorporate projection optical systems that are capable of maintaining the same, or increased performance, as the current projections lens systems, achieve excellent aberration correction, and which have high numerical apertures.

REFERENCES:
patent: 4037937 (1977-07-01), Minoura
patent: 4619508 (1986-10-01), Shibuya et al.
patent: 4770477 (1988-09-01), Shafer
patent: 4939630 (1990-07-01), Kikuchi et al.
patent: 4976525 (1990-12-01), Matsumura et al.
patent: 5237367 (1993-08-01), Kudo
patent: 5260832 (1993-11-01), Togino et al.
patent: 5392094 (1995-02-01), Kudo

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