Electric heating – Metal heating – By arc
Patent
1997-10-23
1999-12-14
Evans, Geoffrey S.
Electric heating
Metal heating
By arc
2191218, 359622, B23K 2600
Patent
active
060021012
ABSTRACT:
A method of manufacturing a semiconductor device by emitting a laser beam from an excimer laser, modifying an energy distribution by passing the beam through a lateral flyeye lens followed by a vertical flyeye lens, condensing the laser beam in two perpendicular sections by two cylindrical lenses to give the beam a rectangular shape, where the longer side can be in excess of 10 cm, then scanning the beam with a single direction over a semiconductor device.
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Ishihara Hiroaki
Yamazaki Shunpei
Zhang Hongyong
Evans Geoffrey S.
Robinson Eric J.
Semiconductor Energy Laboratory Co,. Ltd.
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