Micromachined photoionization detector

Details Micromachined photoionization detector Micromachined photoionization detector

1995-09-29

1999-01-05

Soderquist, Arlen

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing gas sample

422 50, 422 89, 422 90, 436153, 250373, 250382, 250383, 250423P, 250437, G01N 2101, G01N 2312, G01T 118, H01J 2700

Patent

active

058558500

ABSTRACT:
A photoionization detector includes a brittle substrate having a void micromachined therein with a void inlet and a void outlet. First and second electrodes are disposed in the void. An ultraviolet transparent member covers at least a portion of the void in which the electrodes are disposed. A gas sample passes through the void and is exposed to ultraviolet radiation from a UV source. Ionization of the sample is measured as current flowing between the electrodes.

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