Automatic alignment apparatus having low and high resolution opt

Details Automatic alignment apparatus having low and high resolution opt Automatic alignment apparatus having low and high resolution opt

1986-08-25

1989-07-04

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356400, G01N 2186, G01B 1100

Patent

active

048453730

ABSTRACT:
An optico-mechanical alignment apparatus having at least two optical paths, one with low resolution and one with high resolution providing an image to video image generator. The image forms a first data set that is compared to a second data set representative of the preferred alignment of an object to be aligned by a comparison means that can automatically move a stage mounting the object to be aligned in the X, Y and Z directions and rotate it in the X Y plane. The object is coarsely aligned with the low resolution optics and then finely aligned with the high resolution optics.

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patent: 4575250 (1986-03-01), Suzuki
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