Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1998-05-04
1999-12-14
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 514, G01B 714
Patent
active
060002816
ABSTRACT:
A combined atomic force microscope and stylus profilometer adapted to measure critical dimensions on a surface. The stylus profilometer is placed at a first position sufficiently near an edge of a first feature and the atomic force microscope subsequently measures the distance from this first position to the edge. The stylus profilometer is then positioned at a second position sufficiently near an edge of a second feature, measuring the distance from the first position to the second position. The atomic force microscope then measures the distance from the second position to the edge of the second feature.
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Advanced Micro Devices , Inc.
Daffer Kevin L.
Larkin Daniel S.
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