Radiation imagery chemistry: process – composition – or product th – Holographic process – composition – or product
Patent
1993-05-27
1995-02-28
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Holographic process, composition, or product
430320, 430 2, 430942, 430296, 25049222, 2504923, 359565, 359569, G03C 500, G03H 500
Patent
active
053936345
ABSTRACT:
A method for producing a phase hologram using e-beam lithography provides n-ary levels of phase and amplitude by first producing an amplitude hologram on a transparent substrate by e-beam exposure of a resist over a film of metal by exposing n.ltoreq.m.times.m spots of an array of spots for each pixel, where the spots are randomly selected in proportion to the amplitude assigned to each pixel, and then after developing and etching the metal film producing a phase hologram by e-beam lithography using a low contrast resist, such as PMMA, and n-ary levels of low doses less than approximately 200 .mu.C/cm.sup.2 and preferably in the range of 20-200 .mu.C/cm.sup.2, and aggressive development using pure acetone for an empirically determined time (about 6 sec.) controlled to within 1/10 sec. to produce partial development of each pixel in proportion to the n-ary level of dose assigned to it.
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Maker Paul D.
Muller Richard E.
Angebranndt Martin J.
Bowers Jr. Charles L.
Jones Thomas H.
Kusmiss John H.
Miller Guy M.
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