Method and apparatus for vertical transfer of a semiconductor wa

Details Method and apparatus for vertical transfer of a semiconductor wa Method and apparatus for vertical transfer of a semiconductor wa

1998-05-22

1999-08-03

Keenan, James W.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414937, B65G 4907

Patent

active

059316314

ABSTRACT:
A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

REFERENCES:
patent: 5431600 (1995-07-01), Murata et al.
patent: 5462397 (1995-10-01), Iwabuchi
patent: 5538385 (1996-07-01), Bacchi et al.
patent: 5562383 (1996-10-01), Iwai et al.
patent: 5570990 (1996-11-01), Bonora et al.
patent: 5628604 (1997-05-01), Murata et al.
patent: 5655869 (1997-08-01), Scheler et al.
patent: 5664927 (1997-09-01), Takeuchi
patent: 5810537 (1998-09-01), Briner et al.

Affiliated with

Also associated with

Rating

Method and apparatus for vertical transfer of a semiconductor wa does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for vertical transfer of a semiconductor wa, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for vertical transfer of a semiconductor wa will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-843231