Method of manufacturing a magnetic thin film

Details Method of manufacturing a magnetic thin film Method of manufacturing a magnetic thin film

1986-02-05

1988-01-05

Pianalto, Bernard D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427128, 4272553, 427294, B05D 306

Patent

active

047175842

ABSTRACT:
An organic metal compound containing elements constituting a magnetic material and an oxygen gas are introduced into plasmas at a low pressure and a thin film of magnetic oxide is prepared on an organic film or aluminum at low temperature.

REFERENCES:
patent: 2642339 (1953-06-01), Sawyer
patent: 2919207 (1959-12-01), Scholzel
patent: 4466258 (1984-08-01), Sando et al.
patent: 4557944 (1985-12-01), Arai et al.
Iwasaki et al., IEEE Transactions on Magnetics, vol. MAG-13, No. 5, pp. 1272-1277 (1977).
Iwasaki et al., IEEE Transactions on Magnetics, vol. MAG-14, No. 5, pp. 849-851 (1978).
Hoshi et al., The Transactions of The Institute of Electronics and Communication Engineers of Japan (C) J. 66-C, 1, pp. 9-16 (Jan., 1983).
Abe, Journal of Magnetics Society of Japan, vol. 8, No. 5 (1984), pp. 366-372.
Martens et al., IEEE Transactions of Magnetics, vol. MAG-20, No. 5, Sep. 1984, pp. 1007-1012.

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