Optical reflectance method of examining a SIMOX article

Details Optical reflectance method of examining a SIMOX article Optical reflectance method of examining a SIMOX article

1987-04-23

1988-08-23

Laroche, Eugene R.

Radiant energy

Invisible radiant energy responsive electric signalling

With means to inspect passive solid objects

25037001, 250372, G01N 2300, G01T 122, G01J 142

Patent

active

047663170

ABSTRACT:
The present invention provides an optical method of quickly, easily, and accurately determining the degree of amorphism, surface roughness, and presence of a contaminating film on the surface of a SIMOX article. The reflectances of the SIMOX material and a reference single crystalline silicon material are compared. Reflectances are obtained at three selected wavelengths and used to evaluate three simultaneous equations which yield values for the parameters A, B, and C when A, B, and C represent the degree of amorphism, surface roughness, and surface contamination respectively.

REFERENCES:
patent: 4352016 (1982-09-01), Duffy et al.
patent: 4352017 (1982-09-01), Duffy et al.
patent: 4511800 (1985-04-01), Harbeke

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