Method for forming micropatterns utilizing a transparent raised

Details Method for forming micropatterns utilizing a transparent raised Method for forming micropatterns utilizing a transparent raised

1974-05-06

1976-03-09

Kimlin, Edward C.

Gas separation: apparatus

Electric field separation apparatus

Electrode cleaner, apparatus part flusher, discharger, or...

96 27R, 96 35, 96 362, 96 383, 96 44, G03C 500, G03C 506

Patent

active

039429814

ABSTRACT:
A method for forming micropatterns comprising, superposing a transparent raised image formed on a transparent substrate on a photosensitive layer of a photographic material or forming a transparent raised image on the photosensitive layer of the photographic material, uniformly exposing the photosensitive layer through the transparent raised image to light to which the photosensitive layer is sensitive so that the light intensity at edges of the transparent image is non-uniform, and developing the photosensitive layer to form a micropattern corresponding to the outlines of the transparent raised image.

REFERENCES:
patent: 3503681 (1970-03-01), Jons et al.
patent: 3653898 (1972-04-01), Shaw
patent: 3719487 (1973-03-01), Schutze et al.
patent: 3744904 (1973-07-01), Loprest et al.
patent: 3801410 (1974-04-01), Detrick et al.

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