Objective for an IC mask testing device

Details Objective for an IC mask testing device Objective for an IC mask testing device

1983-06-30

1985-06-04

Corbin, John K.

350414, G02B 2102, G02B 962

Patent

active

045210861

ABSTRACT:
An objective for an IC mask testing device comprising a first, second, third, fourth, fifth and sixth lens components wherein the first lens component is a positive meniscus lens, the second lens component is a biconvex lens, the third lens component is a cemented doublet consisting of a biconvex lens and a biconcave lens, the fourth lens component is a cemented doublet consisting of a biconcave lens and a biconvex lens, the fifth lens component is a biconvex lens, and the sixth lens component is a negative meniscus lens, the objective for an IC mask testing device having favorably corrected chromatic aberration for the fluorescent wavelength as well as favorably corrected chromatic aberration in general, a long working distance and high magnification.

REFERENCES:
patent: 4232941 (1980-11-01), Tojo

Affiliated with

Also associated with

Rating

Objective for an IC mask testing device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Objective for an IC mask testing device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Objective for an IC mask testing device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-826030