Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1975-11-04
1978-06-13
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204192SP, 204192N, C23C 1500, G21F 902
Patent
active
040947629
ABSTRACT:
A method for storage of a material comprising:
REFERENCES:
patent: 3294669 (1966-12-01), Theurer
patent: 3326178 (1967-06-01), De Angelis
patent: 3463715 (1969-08-01), Bloom
patent: 3486935 (1969-12-01), Eyrich
W. R. Wormald et al., "The Preparation of Tantalum Nitride Targets by Reactive Sputtering, " Nuclear Instruments and Methods, Mar. 1973, pp. 233-235.
United Kingdom Atomic Energy Authority
Weisstuch Aaron
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