Means and methods for heating semiconductor ribbons and wafers w

Details Means and methods for heating semiconductor ribbons and wafers w Means and methods for heating semiconductor ribbons and wafers w

1986-07-28

1987-12-22

Macon, Robert S.

Electric heating

Metal heating

Of cylinders

219 1055A, 219 1057, H05B 670

Patent

active

047148101

ABSTRACT:
Means and method including a novel waveguide sample holder for applying traveling microwaves to heat thin low-resistivity semiconductor ribbons and wafers without a susceptor. Traveling microwaves are applied to the semiconductor materials, both with and without a traveling wave resonator. Efficient coupling is obtained by unique placement of the samples in the waveguide.

REFERENCES:
patent: 3083528 (1963-04-01), Brown
patent: 4476363 (1984-10-01), Berggren et al.

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