Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Patent
1997-10-01
1999-03-16
Westin, Edward P.
Radiant energy
Photocells; circuits and apparatus
Photocell controlled circuit
257531, H01J 4014
Patent
active
058833820
ABSTRACT:
A movable plate 5 and torsion bars 6 are monolithically formed in a semiconductor substrate 2. A flat coil 7 is formed on peripheries of the movable plate 5 while a photodiode 8 is formed on a central portion of the movable plate 5. Permanent magnets 10A, 10B, 11A and 11B are provided on upper and lower spaces of the peripheries of the movable plate 5 while coils 12A and 12B for detecting a displacement angle of the movable plate 5 are provided on lower spaces of the peripheries of the movable plate 5. Flowing a current into the flat coil 7 generates a driving force depending on a relation with magnetic fields induced by the permanent magnets 10A, 10B, 11A and 11B, which makes the movable plate 5 to rotate axially around the torsion bars 6 to vary an orienting direction of an optical axis of the photodiode 8. The displacement angle of the optical axis is detectable by changes in mutual inductances between the flat coil 7 and the detection coils 12A and 12B, namely, changes in induction voltages of the detection coils 12A and 12B.
REFERENCES:
patent: 5362960 (1994-11-01), Komatsu et al.
Nihon Shingo Kabushiki Kaisha
Pyo Kevin
Squire William
Westin Edward P.
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