Swap out plate and assembly

Details Swap out plate and assembly Swap out plate and assembly

1996-09-20

1999-12-07

Bucci, David A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414939, B65G 106

Patent

active

059972351

ABSTRACT:
A load lock is comprised of a housing defining a partial chamber therein opening to a first face, the load lock defining a given point on which the center of a substrate is supported. A swap out plate is secured to the load lock and covers the first face thereof. The swap out plate defines a partial chamber therein and has a horizontally extending slot communicating with the chamber. A substrate support is secured to the load lock for supporting a substrate thereon such that the supported substrate extends between the swap out plate partial chamber and the load lock partial chamber.

REFERENCES:
patent: 4717461 (1988-01-01), Strahl et al.
patent: 5080549 (1992-01-01), Goodwin et al.
patent: 5295777 (1994-03-01), Hodos
patent: 5387067 (1995-02-01), Grunes
patent: 5405230 (1995-04-01), Ono et al.
patent: 5435682 (1995-07-01), Crabb et al.
patent: 5445491 (1995-08-01), Nakagawa et al.
patent: 5447409 (1995-09-01), Grunes et al.
patent: 5474410 (1995-12-01), Ozawa et al.
patent: 5588789 (1996-12-01), Muka et al.

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