Membrane and mask, and exposure apparatus using the mask, and de

Details Membrane and mask, and exposure apparatus using the mask, and de Membrane and mask, and exposure apparatus using the mask, and de

1996-07-16

1999-03-16

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

378 35, 428698, G03F 900

Patent

active

058828265

ABSTRACT:
X-ray or vacuum-ultraviolet-ray transmissive mask membrane is constituted by a laminated film. The laminated film is obtained by continuously forming a SiCN film on one of or each of sides of a SiC film. Thereby, a membrane, which is superior in physical or mechanical strength and in surface conditions and optical transmittance, is provided. Moreover, there is provided a mask using the membrane.

REFERENCES:
patent: 5320703 (1994-06-01), Ikeda et al.
patent: 5469489 (1995-11-01), Miyake et al.
patent: 5589304 (1996-12-01), Chiba et al.

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