Method of manufacturing microfluidic devices

Details Method of manufacturing microfluidic devices Method of manufacturing microfluidic devices

1997-06-18

1999-03-16

Ball, Michael W.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

156286, 1563082, 1563099, B29C 6500, B32B 3120

Patent

active

058824650

ABSTRACT:
The present invention is directed to improved methods and apparatuses for manufacturing microfabricated devices, and particularly, microfluidic devices. In general the methods and apparatuses of the invention provide improved methods of bonding substrates together by applying a vacuum to the space between the substrates during the bonding process.

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patent: 5486335 (1996-01-01), Wilding et al.
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patent: 5788814 (1998-08-01), Sun et al.
AB-Manufacturing, Inc. Brochure for High Performance Table-Top Mask Alignment and Exposure Systems.
Ghandi, "Lithographic Processes," VLSI Fabrication Principles Chapter 10 (1983).

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