Thermal diffusion fluid flow sensor

Details Thermal diffusion fluid flow sensor Thermal diffusion fluid flow sensor

1986-03-12

1987-12-22

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

By measuring transit time of tracer or tag

73204, G01F 168, G01P 510

Patent

active

047139706

ABSTRACT:
A miniature solid state fluid flow sensor has a low diffusivity substrate, such as a polymer film, which is optionally mounted on a thermally conductive base. A resistor strip on the substrate is connected to an electrical oscillator and thus emits thermal waves which are propagated through the fluid at a rate dependent on a fluid flow component perpendicular to the strip. A thermoelectric detector, spaced from one side or each side of the strip, senses the thermal waves; and detector circuitry determines the time or phase shift due to fluid flow.
A reference sensor is positioned relative to the primary flow sensor to compensate for the effects of pressure and temperature changes and uses properties of symmetry to assure low sensitivity to variations in the direction of fluid flow.

REFERENCES:
patent: 4332157 (1982-06-01), Zemal et al.
patent: 4373386 (1983-02-01), Schuddemat et al.
patent: 4483200 (1984-11-01), Togawa et al.
patent: 4502339 (1985-03-01), Horn
patent: 4561303 (1985-12-01), McCarthy

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