Coating processes – Centrifugal force utilized
Patent
1990-07-18
1993-05-18
Bell, Janyce
Coating processes
Centrifugal force utilized
156644, 427369, 437231, B05D 312
Patent
active
052119866
ABSTRACT:
According to the invention, a viscous substance is applied to the undulated surface of a substrate to be processed, and a gravity-like force greater than that of normal gravity is applied to the viscous substance in the direction orthogonal to the principal plane of the substrate. Consequently, the viscous substance applied on the convex parts flows into the concave parts under the influence of the gravity-like force, so as to fill up the concave parts with the viscous substance. As a result, the top of the surface of the substrate is substantially flattened.
To apply such gravity, the invention employs a rotor, and a substrate holder supported in part of the rotor in a rotatable manner, and by rotating the rotor at high speed, the substrate holder is automatically rotated, and the substrate mounted on the substrate holder is positioned in the direction orthogonal to the rotating plane of the rotor, so that a kind of gravity by centrifugal force may be applied to the viscous substance.
REFERENCES:
patent: 3379558 (1968-04-01), Upton
patent: 4385083 (1983-05-01), Shelley
patent: 4672023 (1987-06-01), Leung
patent: 4806504 (1989-02-01), Cleeves
"Remover For Peripheral Resist Buildups" in IBM Technical Bulletin, vol. 19, No. 6, Nov. 1976.
Bell Janyce
Matsushita Electric - Industrial Co., Ltd.
LandOfFree
Method for processing a substrate surface and an apparatus there does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for processing a substrate surface and an apparatus there, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for processing a substrate surface and an apparatus there will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-803168