Layered low dielectric constant technology

Details Layered low dielectric constant technology Layered low dielectric constant technology

1995-06-02

1997-12-02

Niebling, John

Fishing, trapping, and vermin destroying

437228, 437235, 437238, H01L 21441

Patent

active

056935668

ABSTRACT:
A layered dielectric structure is provided, which separates a first layer of metal interconnects from each other in semiconductor devices and also separates the first layer from a second, overlying layer of metal interconnects for making electrical contact to the first layer of metal interconnects. The layered dielectric structure comprises: (a) a layer of an organic spin-on-glass material filling gaps between metal interconnects in the first layer of metal interconnects; (b) a layer of an inorganic spin-on-glass material to provide planarization to support the second layer of metal interconnects; and (c) a layer of a chemically vapor deposited oxide separating the organic spin-on-glass layer and the inorganic spin-on-glass layer. The layered dielectric structure provides capacitances on the order of 3.36 to 3.46 in the vertical direction and is about 3.2 in the horizontal direction. This is a reduction of 10 to 15% over the prior art single dielectric layer, using existing commercially available materials.

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