Apparatus for measuring velocity of flow

Details Apparatus for measuring velocity of flow Apparatus for measuring velocity of flow

1987-03-03

1988-09-13

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

731182, 338 25, G01F 168

Patent

active

047700360

ABSTRACT:
In an arrangement for measuring the velocity of flow of fluids, and, in particular, of the intake air of internal combustion engines, having an electrically heatable resistance layer which is applied in insulated manner on a support and is in thermal contact with the flowing fluid, the support consists of silicon. Between the support and the resistance layer an electrically insulating layer is applied. The resistance layer consists preferably of suitably doped polycrystalline silicon.

REFERENCES:
patent: 4471647 (1984-09-01), Jerman et al.
patent: 4498337 (1985-02-01), Gruner
patent: 4554829 (1985-11-01), Sumal
patent: 4680963 (1987-07-01), Tabata et al.
patent: 4696188 (1987-09-01), Higashi

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