Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1992-07-29
1994-07-05
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356356, 356363, G01B 902
Patent
active
053272218
ABSTRACT:
A device for detecting the positional relationship between first and second objects in a predetermined direction includes a light source for emitting light in a direction to the first or second object, and a first detecting portion for detecting the position of incidence of a first light deflected by the first and second objects, wherein the position of incidence of the first light upon the first detecting portion is changeable with a change in the positional relationship between the first and second objects in the predetermined direction. A second detecting portion detects the position of incidence of a second light deflected by at least one of the first and second objects, wherein the state of the position of incidence of the second light resulting from a change in the positional relationship between the first and second objects, in the predetermined direction differs from that of the first light. On the basis of the detection by the first and second detecting portions, the positional relationship between the first and second objects is detected without being affected by an inclination thereof.
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M. Feldman, et al. "Application of Zone Plates to Alignment in X-Ray Lithography", Optical Engineering, Mar.-Apr. 1983, vol. 22, No. 2, pp. 203-207.
Abe Naoto
Kuroda Ryo
Matsugu Masakazu
Niwa Yukichi
Nose Noriyuki
Canon Kabushiki Kaisha
Turner Samuel A.
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