Micro-dimensional measurement apparatus

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250561, 356398, 356394, 382 8, G01B 1100, G01N 2186

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049106902

ABSTRACT:
In a micro-dimensional measurement apparatus including an optical scanning system and a processor for optical data obtained therefrom, the measurement is based upon a comparison of previously prepared reference data and optical data obtained from an object to be measured. The comparison is carried out by using at least two kinds of optical data.

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"Electronic's", vol. 20, May 1978, pp. 36-41, [Untranslated Japanese Publication].

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