Oxide-capped titanium silicide formation

Details Oxide-capped titanium silicide formation Oxide-capped titanium silicide formation

1991-12-27

1994-07-05

Quach, T. N.

Fishing, trapping, and vermin destroying

437190, 437228, 437238, 148DIG15, 148DIG19, 156653, 156657, H01L 21283, H01L 2131

Patent

active

053267249

ABSTRACT:
A titanium nitride layer is deposited between the metal titanium layer and the oxide cap of a conventional oxide capped titanium disilicide technology process. This titanium nitride layer is deposited in-situ after a certain thickness of metal titanium has been deposited by bleeding nitrogen gas into the titanium sputter machine. Thereafter the normal oxide cap is deposited over this titanium nitride layer. The normal titanium react process is performed to produce titanium disilicide. After the titanium disilicide has been produced, it is then necessary to strip off the oxide cap. The extra titanium nitride layer makes it is possible to use a wet etch to remove the oxide cap, with the titanium nitride layer serving as a etch stop. In this manner an isotropic wet etch may be employed to remove all of the oxide cap layer. The isotropic wet etch is preferably a 10% buffered HF etch.

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