Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1991-11-25
1994-03-29
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324158D, G01R 3126
Patent
active
052988600
ABSTRACT:
A method of analyzing metal impurities in a surface oxide film of a semiconductor substrate enables a detection sensitivity of the order of 10.sup.11 atoms/cm.sup.2 in a simple technique. This method comprises measuring a quantity of oxide charge resulting from specified metal impurities existing in the surface oxide film formed on the surface of a semiconductor substrate, and using a predetermined correlation between the quantity of metal impurities and the quantity of oxide charge to determine the quantity of metal impurities in the surface oxide film from the measured quantity of oxide charge of the surface oxide film. Further, it is possible to determine the distribution of concentration of the metal impurities in a thermal oxide film on a silicon substrate by determining a correlation between a depth of the thermal oxide film and a quantity of oxide charge resulting from the metal impurities in the thermal oxide film and by using the correlation between the quantity of the metal impurities in the thermal oxide film and the measured quantity of oxide charge resulting therefrom.
REFERENCES:
patent: 4551674 (1985-11-01), Miller
patent: 4598249 (1986-07-01), Goodman et al.
patent: 4812756 (1989-03-01), Curtis et al.
patent: 4827212 (1989-05-01), Kamieniecki
Karlsen Ernest F.
Seiko Epson Corp.
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