Method of producing semiconductor device

Details Method of producing semiconductor device Method of producing semiconductor device

1987-09-17

1990-03-20

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437189, 437195, 437230, 437235, 437241, 357 67, 427 39, H01L 2144

Patent

active

049101692

ABSTRACT:
A method of producing a semiconductor device includes the steps of forming a metallization film including copper on a surface of a substrate, and depositing an insulating film on a surface of the metallization film at a temperature which is below the oxidation temperature of copper.

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