High voltage complementary NPN/PNP process

Fishing – trapping – and vermin destroying

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437 8, 437 12, 437 82, 357 48, H01L 1900

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active

049101609

ABSTRACT:
A process is disclosed for forming high-performance, high voltage PNP and NPN power transistors in a conventional monolithic, planar, epitaxial PNP junction isolated integrated circuit. The process permits independently optimizing the NPN and PNP power trransitors. Where high-voltage devices are desired a field threshold adjustment implant is applied. It also includes provisions for testing critical portions of the process at appropriate points.

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