Method of making an array of electron emitters

Details Method of making an array of electron emitters Method of making an array of electron emitters

1991-12-31

1994-06-07

Quach, T. N.

Fishing, trapping, and vermin destroying

437 41, 437 48, 437186, 156647, 156653, 445 50, H01L 21335, H01L 21283

Patent

active

053189183

ABSTRACT:
This is a method of forming an array of electron emitters at the face of a semiconductor layer. The method comprises the steps of depositing a layer of polycrystalline silicon on a face of a semiconductor workpiece; doping the polycrystalline silicon layer to render the polycrystalline silicon layer conductive; and for each of a plurality of emitter cells, performing an orientation-dependent polycrystalline silicon etch to define a pyramid for the cell having a base affixed to the workpiece and an upstanding tip opposed to the base. Preferably the method also includes the steps of forming a field effect transistor at the face of the workpiece prior to the depositing of the layer, with the pyramid having a base in conductive contact with the drain of the transistor. The polycrystalline silicon layer may be doped in situ after deposition.

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