Casting sharpened microminiature tips

Fishing – trapping – and vermin destroying

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437228, 437239, 437249, H01L 21302

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active

055808271

ABSTRACT:
Sharpened microminiature tips are produced by casting in a silicon/silicon dioxide mold. The silicon dioxide layer is formed by exposing cavities in a single crystal substrate to an oxidizing species at a low temperature. Anomalous oxidation of silicon results in a differential thickness in the silicon dioxide layer, providing a convex contour on the surface of the cavities, leading to a sharpened end. The tip can be made from any kind of material that can be cast in a silicon mold. The sharpened tip can be integrated with a member to form a cantilever. An improved scanning probe microscope can be built with the sharpened tip in the cantilever structure.

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R. B. Marcus et al., "The Oxidation of Shaped Silion Surfaces," J. Electrochem. Soc. Solid State Science & Tech., Jun. 1982 pp. 1278-1282.

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