Protective coating useful as a passivation layer for semiconduct

Details Protective coating useful as a passivation layer for semiconduct Protective coating useful as a passivation layer for semiconduct

1988-03-02

1992-02-11

Mintel, William

357 52, 357 2, 357 67, H01L 2194, H01L 21469, H01L 21441

Patent

active

050879596

ABSTRACT:
A protective coating useful as a passivation layer for semiconductor devices incorporates a thin film of an amorphous diamond-like carbon. In one implementation, a thin film of amorphous silicon is deposited over the carbon material. The semiconductive passivation coating prevents electrical shorts, dissipates charge build-up and protects against chemical contamination.

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