Encoder with diffraction grating and multiply diffracted light

Details Encoder with diffraction grating and multiply diffracted light Encoder with diffraction grating and multiply diffracted light

1989-09-21

1990-11-13

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

25023116, H01J 314

Patent

active

049703889

ABSTRACT:
An encoder for measuring the displacement of a movable diffraction grating has means for applying a radiation beam to the diffraction grating, a reflecting optical system for causing first and second reflected and diffracted beams created on the diffraction grating by the application of the radiation beam to be reflected and diffracted at least twice by the diffraction grating, and means for receiving an interference beam formed by the first and second reflected and diffracted beams reflected and diffracted at least twice and converting it into a signal conforming to the displacement of the diffraction grating.

REFERENCES:
patent: 4629886 (1986-12-01), Akiyama et al.
patent: 4792678 (1988-12-01), Spies
patent: 4829342 (1989-05-01), Nishimura
patent: 4868385 (1989-09-01), Nishimura
patent: 4912320 (1990-03-01), Ishii et al.

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