Positioning device of table for semiconductor wafers

Details Positioning device of table for semiconductor wafers Positioning device of table for semiconductor wafers

1989-10-26

1991-06-11

Smith, Gary L.

Supports

Stand

To hold a particular article

269 73, 248913, F16M 1104

Patent

active

050226193

ABSTRACT:
A positioning device for a table on which a semiconductor wafer is moved into an inspection position is described. It comprises a pneumatic stage supporting the table and movable both in the x and y directions, a moving device using wire which moves the stage in the x or y direction, and a fine resolution lifting device which moves or lifts the table vertically.

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