Apparatus on the carousel principle for the coating of substrate

Details Apparatus on the carousel principle for the coating of substrate Apparatus on the carousel principle for the coating of substrate

1988-10-24

1990-11-13

Werner, Frank E.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414331, 414225, 414222, 118719, 118729, 118730, 118500, 204298, B65G 4905

Patent

active

049697900

ABSTRACT:
Apparatus for the coating of substrates in a vacuum chamber is disclosed wherein a rotatable substrate holder bears a plurality of substrate receivers adapted to transport a like number of substrates (26, 26', etc.) step-wise on a circular path from one of two lock stations (8, 9) through an associated coating station (10, 11) and back to the same respective lock station.
Each lock station has one transfer device comprising a rotating substrate plate bearing substrate receivers (85, 85', etc. and 86, 86', respectively). Each plate cooperates with four magazines (18, 18', etc. and 19, 19', etc., respectively). Each magazine is equipped with at least two stacks (25, 25', etc., and 27, 27', etc., respectively) of substrates (26, 26', etc.). A rotating device (28, 28', etc. and 29, 29', etc., respectively) cooperates with each of the magazines (18, 18', etc. and 19, 19', etc., respectively) and transports the substrates (26, 26', etc.) between the magazines (18, 18', etc. and 19, 19', etc., respectively) and the substrate receivers (85, 85', etc. and 86, 86', respectively) of the substrate plates (20a, 21a).

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