Method of forming light beam, apparatus therefor, method of meas

Details Method of forming light beam, apparatus therefor, method of meas Method of forming light beam, apparatus therefor, method of meas

1995-12-06

1999-10-26

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356351, 356401, G01B 902

Patent

active

059737859

ABSTRACT:
Technology for forming a fine light beam having a size smaller than the theoretical limit determined by the wavelength of light and characteristics of an objective lens. A beam distribution shifter having two light transmission regions is disposed between a source of light and an objective lens, a phase shifter is provided on one of the two light transmission regions to divide the light passing through the beam distribution shifter into two light fluxes having phases opposite to each other, and the two light fluxes are focused through the objective lens to form a fine light beam having a size smaller than the theoretical limit determined by the wavelength of the light and characteristics of the objective lens due to destructive interference between the two light fluxes.

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patent: 5298365 (1994-03-01), Okamoto et al.
F. Jenkins et al., Fundamentals of Optics, fourth edition, McGraw-Hill, New York, 1976, pp. 270-285.
J. Raffel et al., "Laser Programmed Vias for Restructurable VLSI", International Electron Devices Meeting, Dec. 1980, pp. 132-135.

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