Alignment apparatus

Details Alignment apparatus Alignment apparatus

1985-02-08

1987-04-21

Rosenberger, R. A.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356394, G01B 1100

Patent

active

046592270

ABSTRACT:
An apparatus for aligning objects on the basis of a signal obtained by scanning marks formed on the objects. A position datum representing the relative position between the objects is extracted on the basis of an extraction level. The marks are scanned a plurality of times and an average is obtained by the plural data provided on the basis of the extraction datum. Those operations are repeated with one or more different extraction levels. In each of the data group corresponding to one of the extraction data, a peculiar or exceptional datum is determined. Among the peculiar data obtained for individual sets of data, a minimum is selected. Thus, an extraction datum which results in the minimum peculiar datum is determined. The average of the position data obtained with this extraction datum is used for bringing the objects into alignment with each other.

REFERENCES:
patent: 4487505 (1984-12-01), Nakano et al.

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