Multichamber coating apparatus

Details Multichamber coating apparatus Multichamber coating apparatus

1993-03-30

1995-01-17

Bucci, David A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

118719, 118729, 20429825, C23C 1654, C23C 1700, B65G 4906

Patent

active

053821262

ABSTRACT:
A transport car open at the top and supported on rollers moves a substrate from a first coating chamber to a second coating chamber separated by a gate 7 running transversely of the direction of movement of the transport car 5. The gate 7 is formed of an upper gate part 8 and a lower gate part 9 forming a slot 10 which is adaptable to the cross section of the car. A cover associated with the top gate part and parallel to the direction of movement has an area greater than the car in order to minimize gas transfer between chambers.

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patent: 4911815 (1990-03-01), Kamei et al.
patent: 5215420 (1993-06-01), Hughes et al.
patent: 5266116 (1993-11-01), Fujioka et al.
patent: 5275709 (1994-01-01), Anderle et al.

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