Projection exposure apparatus and semiconductor device manufactu

Photocopying – Projection printing and copying cameras – Step and repeat

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

355 71, G03B 2772

Patent

active

054366925

ABSTRACT:
A projection exposure apparatus includes an illumination optical system for constituting illumination source for illuminating an original having an exposure pattern, the illumination optical system including changing mechanism for changing a shape of the illumination source; a projection optical system for projecting an image of the exposure pattern onto a surface to be exposed; an adjuster responsive to the changing mechanism to adjust the projection optical system.

REFERENCES:
patent: 4739373 (1988-04-01), Nishi et al.
patent: 4754307 (1988-06-01), Burki et al.
patent: 4814829 (1989-03-01), Kosugi et al.
patent: 4851882 (1989-07-01), Takahashi et al.
patent: 4871257 (1989-10-01), Suzuki et al.
patent: 4939630 (1990-07-01), Kikuchi et al.
patent: 4988188 (1991-01-01), Ohta
patent: 5061956 (1991-10-01), Takubo et al.
patent: 5160962 (1992-11-01), Miura et al.
patent: 5305054 (1994-04-01), Suzuki et al.
patent: 5335044 (1994-08-01), Shiraishi
patent: 5337097 (1994-08-01), Suzuki et al.
patent: 5345292 (1994-09-01), Shiozawa et al.
patent: 5357312 (1994-10-01), Tounai
patent: 5363172 (1994-11-01), Tokuda

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Projection exposure apparatus and semiconductor device manufactu does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection exposure apparatus and semiconductor device manufactu, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure apparatus and semiconductor device manufactu will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-743380

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.