Patent
1976-06-23
1977-10-11
Gonzales, John
96 361, G03B 4100
Patent
active
040539059
ABSTRACT:
In an optical scanning apparatus for photolithographic processing of faceplates intended for color cathode ray tubes, a light beam from a source is first deflected through an angle related to a predetermined angle of incidence that an electron beam in an operating tube has with respect to a defined faceplate location, and then the deflection point is imaged onto or in the vicinity of the faceplate. This angle of incidence adjustment is accomplished for each faceplate location as the light beam is scanned over the surface of the faceplate. The light source, which is preferably a laser light source, creates a light beam having a wavelength spectrum which exposes the photosensitive material. The beam is deflected by a pair of orthogonally aligned mirrors which are rotated by galvanometers. Each galvanometer is driven by a current from an electrical control, the current being related to the proper angle of incidence for each faceplate location. An optical focusing device images the point of deflection of the light beam substantially onto the faceplate. This image of the deflection source is then scanned over the surface of the faceplate in a predetermined pattern by a mirror which is rotated about a pair of orthogonal axes by motors which are controlled by the electrical control. By this arrangement, the photoresist on the faceplate is correctly exposed at the proper location to be in registration with the electrons landing on the faceplate after passing through the same mask apertures in the completed cathode ray tube.
REFERENCES:
patent: 3876425 (1975-04-01), Geenen et al.
patent: 3985439 (1976-10-01), Kiemle
Gonzales John
GTE Laboratories Incorporated
Hart Leslie J.
Kriegsman Irving M.
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