Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1994-04-13
1995-07-25
Nguyen, Vinh
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324757, G01R 106
Patent
active
054365716
ABSTRACT:
A probing test method including contacting probe of a probe card with pad on an IC chip on a semiconductor wafer, relatively moving each of the probe along the top of each of the pad, and sending test signal to the pad through the probe. Oxide film on the top of each of the pads can be removed by relative motion between each probe and each pad at an area where they are contacted with each other, contact resistance between the probes and the pads can be reduced to a greater extent, and test signal can be more reliable transmitted between the probes and the pads.
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Nguyen Vinh
Tokyo Electron Limited
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