Micro aspherical lens and fabricating method therefor and optica

Details Micro aspherical lens and fabricating method therefor and optica Micro aspherical lens and fabricating method therefor and optica

1989-11-09

1992-09-15

Arnold, Bruce Y.

Optical: systems and elements

Lens

Including a nonspherical surface

264 14, 359900, G02B 302, B29D 1100

Patent

active

051483220

ABSTRACT:
An electron-beam resist is applied over a substrate so as to have a thickness larger than the maximum thickness of a micro aspherical lens to be fabricated, a predetermined pattern is written on this resist by electron-beam lithography and then, the resist is developed, thereby to fabricate a micro aspherical lens or the prototype thereof. Consequently, a micro aspherical lens causing little on-axis aberration and chromatic aberration and having a diameter of 1 millimeter or less can be achieved with high precision. In addition, the micro aspherical lens can be produced in large quantity because the reproduction thereof is relatively easy. Furthermore, an optical fiber coupling device, a focusing optical system, an optical device, a semiconductor laser light source, an image device or the like can be constructed using the micro aspherical lens thus fabricated. Finally, a micro lens array constructed by arranging converging lenses having a diameter of approximately several to several hundred micrometers in a two-dimensional manner is used and this micro lens array is arranged ahead of a light source, thereby forming a multi-beam spot caused by diffraction in a distant position. A three-dimensional shape can be recognized with high precision by shape recognition means utilizing this multi-beam spot.

REFERENCES:
patent: 4515444 (1985-05-01), Prescott et al.
patent: 4572611 (1986-02-01), Bellman et al.
patent: 4689479 (1987-08-01), Tatsuno et al.
patent: 4842633 (1989-06-01), Kuribayashi et al.
patent: 4877717 (1989-10-01), Suzuki et al.
patent: 4888076 (1989-12-01), Martin
patent: 4948214 (1990-08-01), Hamblen

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