Electric heating – Metal heating – By arc
Patent
1993-06-24
1995-07-25
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912144, 21912147, 156345, 20429808, 20429834, B23K 1000
Patent
active
054364248
ABSTRACT:
A plasma generating apparatus includes a vacuum chamber having an insulated inner surface, more than two electrodes arranged on the insulated inner surface of the vacuum chamber, a high frequency applying device for applying high frequencies having different phases in order of positions of the electrodes, and a holder on which an object to be processed is placed. In the apparatus, a magnetic field is produced under plural alternating electric fields, so that electrons in a plasma generating portion are rotated to generate high density plasma under a high vacuum when the high frequencies are applied to the electrodes to generate the plasma and a specified process such as etching, CVD, or doping is carried on the object by reaction products generated at the portion.
REFERENCES:
patent: 4491496 (1985-01-01), Laporte et al.
patent: 4871421 (1989-10-01), Ogle et al.
patent: 5110438 (1992-05-01), Ohmi et al.
patent: 5116482 (1992-05-01), Setoyama et al.
patent: 5150375 (1992-09-01), Tabata et al.
patent: 5203958 (1993-04-01), Arai et al.
patent: 5228939 (1993-07-01), Chu
patent: 5272417 (1993-12-01), Ohmi
Kubota Masafumi
Nakayama Ichiro
Nomura Noboru
Okuni Mitsuhiro
Tamaki Tokuhiko
Matsushita Electric - Industrial Co., Ltd.
Paschall Mark H.
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